Senior Process Engineer: Dry Etch
Primary Duties & Responsibilities
* Lead the development and optimization of dry etch processes (ICP, RIE) for compound semiconductor applications.
* Drive process integration and improvement initiatives to enhance device performance and yield.
* Define and control etch process parameters for GaAs and InP substrates, ensuring precision, uniformity, and repeatability.
* Utilize advanced metrology tools such as SEM, AFM, ellipsometry, profilometry, XPS, XRD, and optical interferometry for process characterization and defect analysis.
* Work closely with integration, production, and device engineering teams to integrate etch processes into the overall semiconductor fabrication flow.
* Troubleshoot process deviations, particle contamination, and chamber performance issues, implementing corrective actions and continuous improvement strategies.
* Establish and maintain SPC for process monitoring and optimization.
* Evaluate and qualify new etch chemistries, hardware configurations, and process automation tools.
* Develop and document process recipes, work instructions, and standard operating procedures (SOPs).
* Mentor junior engineers and provide technical leadership in semiconductor dry etch and metrology.
Education & Experience
* Bachelor's, Master's, or Ph.D.
in Materials Science, Electrical Engineering, Physics, or related field.
* 10+ years of experience in semiconductor process engineering, specializing in dry etch (ICP, RIE).
* Strong background in etch chemistry, selectivity, anisotropy, and plasma physics for III-V semiconductor processing.
* Expertise in GaAs and InP processing, including device fabrication challenges and best practices.
* Hands-on experience with metrology tools such as SEM, AFM, ellipsometry, profilometry, and XPS for process verification and defect analysis.
* Strong problem-solving skills with experience in data analysis, SPC, and DOE.
* Ability to work in a cleanroom environment and interface with cross-functional engineering teams.
Skills
* Experience with high-volume semiconductor manufacturing or advanced R&D prototyping.
* Knowledge of metal etching, dielectric etching, and post-etch cleaning techniques.
* Familiarity with automation (SECS/GEM), scripting, or AI-driven process control, including FDC and APC
* Demonstrated leadership in technical project management and team mentoring.
Working Conditions
* Will be exposed to areas where hand tools and power tools are being operated
* Will be exposed to areas where hazardous chemicals or gases are stored
* Ability to work in a cleanroom environment per semi-conductor protocol/requirements
Physical Requirements
* Work in a class 100/1000 clean room for extended periods
* Wear full cleanroom attire (smock, mask, etc.)
* Work with and/or around chemicals (such as solids and acids)
* Stand for up to 4 hours at a time
* Lift...
- Rate: Not Specified
- Location: Sherman, US-TX
- Type: Permanent
- Industry: Finance
- Recruiter: Coherent Corp.
- Contact: Not Specified
- Email: to view click here
- Reference: 2009293
- Posted: 2025-11-08 07:33:18 -
- View all Jobs from Coherent Corp.
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